【摘 要】
：
采用蒙特卡罗(Monte Carlo)模拟方法,研究了初始烧蚀粒子总数对其传输中的密度和速度及环境气体密度分布的影响。结果表明,随着烧蚀粒子总数增加,烧蚀粒子高密度峰离开靶的最
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采用蒙特卡罗(Monte Carlo)模拟方法,研究了初始烧蚀粒子总数对其传输中的密度和速度及环境气体密度分布的影响。结果表明,随着烧蚀粒子总数增加,烧蚀粒子高密度峰离开靶的最大距离增大,到距靶最大距离处所用时间,出现先增大后减小的变化,烧蚀Si粒子的速度分布随粒子总数增多而变宽,当粒子总数为1.01×10~(15)和1.01×10~(16)时,出现速度劈裂现象。
The Monte Carlo simulation method was used to study the effect of the total number of initial ablation particles on the density and velocity of transport and the distribution of ambient gas density. The results show that with the increase of the total number of ablated particles, the maximum distance of the high density peak of the ablation particle from the target increases, and the time to maximum distance from the target increases first and then decreases, and the speed of ablating Si particles Distribution increases with the total number of particles widening, when the total number of particles 1.01 × 10 ~ (15) and 1.01 × 10 ~ (16), the rate of splitting phenomenon.
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