依据全反射理论和棱镜耦合原理,实现了对棱镜折射率及波导薄膜材料折射率和厚度的同步测量。使用高准直半导体激光器激光入射到棱镜内部与波导膜的分界面上,逐步旋转棱镜或改变棱镜的入射角,得到棱镜耦合M线,曲线前面几组的波谷为波导模激发,在M线左侧收尾处有一个不完整波峰,其反射光强随入射角迅速衰减,为全反射时的临界点,由此可实现棱镜及波导薄膜参数的同步测量;用此法测量了棱镜耦合一体化平面波导棱镜的折射率和聚甲基丙烯酸甲酯(PMMA)聚合物波导薄膜的折射率和厚度。测量棱镜折射率精度为±1.9×10-4,波导薄膜折射率和厚度的精度分别为±6.2×10-4μm和±1.6×10-2μm。 Based on the theory of total reflection and the principle of prism coupling, the measurement of the refractive index and the refractive index and the thickness of the waveguide film material are realized. Using a highly collimated semiconductor laser, a laser beam is incident on the interface between the prism and the waveguide film, and the prism is gradually rotated or the incident angle of the prism is changed to obtain a prism-coupled M line. The troughs in front of the curve are waveguide mode excitation, There is an incomplete peak at the end of the side, the reflected light intensity decay rapidly with the incident angle, which is the critical point of total reflection, so that the prism and the waveguide film parameters can be measured simultaneously; this method was used to measure the prism-coupled integration plane The refractive index of the waveguide prism and the refractive index and thickness of the polymethylmethacrylate (PMMA) polymer waveguide film. The refractive index of the prism was measured to be ± 1.9 × 10-4. The refractive index and thickness of the waveguide film were ± 6.2 × 10-4μm and ± 1.6 × 10-2μm, respectively.