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本文报道了一台输出功率大于100W、重复频率达300Hz的XeCl准分子激光器的放电开关系统进行实验结果,比较了激励电路放电开关系统中带磁开关和无磁开关两种情况下闸流管的动态放电参数,证明了带磁开关的开关系统有利于激光器高重复频率工作和大功率输出。
In this paper, a discharge switching system of an XeCl excimer laser with an output of more than 100W and a repetition rate of 300Hz is reported. The comparison of the thyristor performance of a thyristor with a magnetic switch and a non-magnetic switch in a discharge circuit of an excitation circuit Dynamic discharge parameters prove that the switch system with magnetic switch is conducive to high repetition frequency laser work and high power output.