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用硅光刻工艺和二氧化硅湿法腐蚀工艺制作了针状封装结构的光纤消逝场传感器.该结构的传感器体积小、试剂消耗量少,减轻了测量过程中光纤的变形,密封的结构可以有效地防止传感器受到污染.从理论和实验角度研究了不同长度的光纤消逝场传感器的测量结果,分析了传感光纤长度对传感器吸光度的影响,指出随着传感器传感光纤长度的继续增加,会使后续增加的传感光纤对传感器灵敏度的贡献越来越小.
The optical fiber evanescent field sensor with needle-shaped package structure is fabricated by using the silicon photolithography process and the silicon dioxide wet etching process. The sensor of the structure has the advantages of small volume, less reagent consumption, reduced deformation of the optical fiber in the measurement process, Effectively prevent the sensor from being polluted.The measurement results of different lengths of fiber evanescent field sensors are studied theoretically and experimentally, the influence of the sensing fiber length on the absorbance of the sensor is analyzed, and it is pointed out that as the sensor sensing fiber length continues to increase, So that the subsequent increase in the sensor fiber contribution to the sensitivity of the sensor smaller and smaller.