1.前言滑动导轨低速下的摩擦振动(即爬行)是影响机械设备工作精度的主要原因之一。多年来,科研工作者提出了很多消除摩擦振动的措施,但有些效果不明显,有些造价昂贵,以至于我国机床行业及数控机床行业在精密位移方面不能形成统一的标准,所以研究新的消除摩擦振动的措施很有必要。通过测试实验发现,在导轨的法向施加微幅激振是消除摩擦振动的简便易行 1. Introduction Frictional vibration (ie, creeping) at low speeds of sliding guides is one of the major causes of the precision of mechanical equipment. Over the years, researchers put forward many measures to eliminate friction and vibration, but some of the results are not obvious and some are expensive. As a result, China’s machine tool industry and CNC machine tool industry can not form a uniform standard in precision displacement. Therefore, Vibration measures are necessary. Through the test experiment found that in the normal rail application of micro-excitation is to eliminate the friction and vibration simple and easy