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提出了一种基于SOI材料的新型3×3多模干涉(MMI)波导光开关,在开关的多模波导中引入折射率调制区,利用硅的等离子色散效应改变多模波导局部区域的折射率,使得光场在传输过程中的相位发生变化,进而确定输出光场位置,实现开关功能。采用有限差分光束传播法(FD-BPM)方法对开关的各个状态进行了模拟和分析,并对器件的结构参量进行了优化设计,采用优化后的结构参量,开关可实现的最大消光比达到-17.27 dB。
A new type of 3 × 3 multimode interference (MMI) waveguide optical switch based on SOI material is proposed. In the multimode waveguide of the switch, a refractive index modulation region is introduced, and the refractive index of the multimode waveguide is changed by using the plasma dispersion effect of silicon , So that the phase of the light field in the transmission process changes, and then determine the location of the output light field to achieve the switching function. The finite difference beam propagation method (FD-BPM) is used to simulate and analyze the state of the switch, and the structural parameters of the device are optimized. With the optimized structure parameters, the maximum extinction ratio achievable by the switch reaches - 17.27 dB.