为了提高纳秒激光成孔质量,改善成孔时孔口熔融物、孔口再铸层、孔的锥度等缺陷,利用超声振动辅助321不锈钢表面纳秒激光成孔,观察孔口微观形貌及上下孔口直径,分析超声振动功率、激光脉冲能量、离焦量以及辅助气体气压对纳秒激光成孔质量的影响。结果表明,在不同工艺参数下的打通孔实验中,超声振动辅助成孔深径比大、再铸层较小、孔壁波纹细密、喷溅物减少,成孔质量得到改善。随着超声功率增大,上下孔口圆度提高、锥度减小,且打孔效率提升;激光脉冲能量对成孔的上下孔口直径、孔口熔渣溅射影响显著;离焦量为1mm时获得锥度最小的孔,且熔渣较少、热影响区面积小,离焦量过大或过小,易造成熔融物聚集,辅助气体压力增大,热影响区减小。 In order to improve the quality of nanofluorescence, improve the defects such as the melt, the recast layer and the taper of the hole, the nanosize laser was used to assist the hole formation on 321 stainless steel by ultrasonic vibration. The diameter of the upper and lower ports, the influence of the ultrasonic vibration power, the laser pulse energy, the defocus amount and the assist gas pressure on the pore forming quality of nanosecond laser were analyzed. The results show that under different technological parameters, the hole depth ratio assisted by ultrasonic vibration is large, the recast layer is smaller, the wavy wall of the hole is fine, the splatter is reduced and the hole forming quality is improved. With the increase of ultrasonic power, the circularity of the upper and lower holes increased, the taper decreased and the drilling efficiency increased. The laser pulse energy had a significant influence on the diameter of the upper and lower holes, When the hole with the smallest taper, and less slag, heat affected zone area is small, too much or too little defocus, easy to cause melt aggregation, assisting the gas pressure increases, heat affected zone decreases.