在温度为923 K、氦离子流强为7×10~(21) m~(-2)·s~(-1)的条件下,考察了低能氦离子辐照对钨材料表面结构的影响。采用扫描电子显微镜(Scanning Electron Microscope,SEM)、导电原子力显微镜(Conductive Atomic Force Microscope,CAFM)、称重法、X射线衍射(X-ray Diffraction,XRD)以及电子背散射衍射(Electron Back-Scattered Diffraction,EBSD)对辐照后钨材料的结构演化规律进行了分析。SEM和CAFM的研究表明,在辐照初期样品表面形成了纳米尺寸的氦泡,随着辐照剂量的增加,氦泡的尺寸和密度逐渐增加,最终引起钨表层的剥落。质量损失和溅射产额的分析结果表明,钨材料表层的剥落是钨损伤的主要形式。SEM、XRD和EBSD的分析证实了辐照后钨样品的表面形貌变化与晶体取向之间具有很强的关联性。研究结果表明,相对于(101),氦原子更容易在(111)和(001)等晶面上吸附、扩散和聚集,这些研究结果将为面向等离子体材料的优化设计提供有用的参考。 Under the conditions of a temperature of 923 K and a helium ion current of 7 × 10 ~ (21) m ~ (-2) s ~ (-1), the effect of low energy helium ion irradiation on the surface structure of tungsten was investigated. Scanning Electron Microscope (SEM), Conductive Atomic Force Microscope (CAFM), Weighing, X-ray Diffraction (XRD) and Electron Back-Scattered Diffraction , EBSD) analyzed the structure evolution of tungsten after irradiation. SEM and CAFM studies show that nano-sized helium bubbles are formed on the surface of the samples at the initial stage of irradiation, and the sizes and densities of the helium bubbles gradually increase with the increase of irradiation dose, which eventually leads to the spalling of the tungsten surface. Analysis of mass loss and sputter yield shows that exfoliation of the tungsten material surface is the major form of tungsten damage. The analysis of SEM, XRD and EBSD confirmed that there is a strong correlation between the surface topography and the crystal orientation of irradiated tungsten samples. The results show that helium atoms are more easily adsorbed, diffused and aggregated on (111) and (001) planes than (101). These results will provide a useful reference for the optimization design of plasma materials.