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在现有的硅基Pb（Zr，Ti）O3（PZT）铁电薄膜的制备工艺基础上，提出了一种以PZT悬臂式振膜为核心的集成微麦克风和扬声器结构，对其进行了优化设计。对微麦克风和扬声器的灵敏度和声输出进行了理论计算。并比较了基于PZT和ZnO两种材料的微麦克风和扬声器的性能差异。
Based on the preparation technology of the existing silicon-based Pb (Zr, Ti) O3 (PZT) ferroelectric thin films, an integrated micro-microphone and speaker structure with PZT cantilever diaphragm as the core is proposed and optimized design. Theoretical calculations were made on the sensitivity and acoustic output of microphones and loudspeakers. The performance differences between microphones and speakers based on PZT and ZnO are compared.