论文部分内容阅读
介绍了衍射微透镜阵列的设计原理与制作工艺方法 ,在此基础上运用部分刻蚀法研制出适用于 3～ 5 μm波长多相位 2 5 6× 2 5 6衍射微透镜阵列。利用光通信半导体激光器和探测器建立了一套测试系统 ,并对所设计的多相位衍射微透镜阵列的衍射率和点扩散函数进行了测试 ,8相位和 16相位石英衍射微透镜的衍射率分别高达 80 .2 %和 87.5 % ,完全满足实际应用的要求。
The design principle and manufacturing process of the diffractive microlens array are introduced. Based on this, a series of 256 × 256 diffractive microlens arrays with multi-phase wavelength of 3 ~ 5 μm are developed by partial etching. A set of testing system was established by using optical communication semiconductor lasers and detectors. The diffraction rate and the point spread function of the designed multiphase diffractive microlens array were tested. The diffraction rates of 8-phase and 16-phase quartz diffractive microlens were respectively Up to 80.2% and 87.5%, fully meet the practical application requirements.