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根据无掩模光刻机的整体结构和工作流程,开发了一款适用于DMD无掩模光刻机的曝光软件。对系统进行了整合,运用开发环境VS2010实现了各个独立的模块的设计。通过串口通信的方式与下位机建立连接,实现对工件台的控制;依托Access2007创建数据库,管理曝光数据及工艺文件;采用图像处理算法和坐标转换技术,实现了曝光过程中的实时自动调焦和套刻对准功能,具有良好的人机交互界面。实验结果表明,软件界面设计友好,上、下位机数据传输稳定,能对工艺文件和曝光实验数据进行管理;上位机软件实现的自动调焦和自动对准功能具有很好的稳定性和可靠性。
According to the maskless lithography machine’s overall structure and workflow, developed a maskless lithography for DMD exposure software. System integration, the use of development environment VS2010 achieved the design of each independent module. Through the serial port communication and the next crew to establish a connection to achieve the control of the workpiece table; relying on Access2007 to create a database to manage exposure data and process files; using image processing algorithms and coordinate conversion technology to achieve real-time automatic exposure during focusing and Set of engraving alignment function, has a good man-machine interface. The experimental results show that the software interface is friendly in design, the data transmission of upper and lower computer is stable, and the process file and exposure experimental data can be managed. The auto-focus and auto-alignment function realized by PC software has good stability and reliability .