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通过积分变换理论上求解了光学薄膜样品在脉冲或方波调制激励光作用下的热传导方程和热弹方程,从而获得了样品在瞬态和稳态情况下对应的温度场和形变场.为验证所求解,将理论解析解的计算机模拟结果与有限元的分析结果在时域和空间域进行了比较,两结果获得了较好的一致性;同时讨论了温度,热变形随激励光的调制频率、光斑半径等参数的变化.讨论了此模型在测量光学薄膜样品吸收损耗和表面热变形中的应用.
The heat conduction equation and the thermoelastic equation of the optical thin film sample under the pulse or square wave excitation light are theoretically solved by the integral transform, and the corresponding temperature and deformation fields of the sample under transient and steady state conditions are obtained. The results of the computer simulation of the theoretical analysis solution are compared with those of the finite element analysis in the time domain and the spatial domain. The two results are in good agreement. The effects of temperature and thermal deformation on the modulation frequency , Spot radius and so on.The variation of absorption loss and surface thermal deformation of the optical thin film were discussed.