概述离子探针是固体成份分析和微区分析的有力工具之一。这些分析是在样品微米数量级范围内进行的。通常称为微区分析手段的还有电子探针(Electron Probe)和激光探针(Laser Probe)。这类仪器有四个主要指标:分析质量范围、质量分辨率、相对灵敏度和绝对灵敏 Overview Ion Probes are one of the powerful tools for solid component analysis and microanalysis. These analyzes are performed on the micrometer order of magnitude of the sample. Commonly referred to as microanalysis are the Electron Probe and the Laser Probe. There are four major indicators of this type of instrument: analytical mass range, mass resolution, relative sensitivity and absolute sensitivity