论文部分内容阅读
提出一种基于卷对卷矩形靶的溅射理论模型,借助Matlab模拟仿真软件,对卷绕柔性衬底(宽度为100 mm,弯曲半径为100 mm,弯曲角为80°)的膜厚均匀性进行分析.首先,在主辊静态条件下,改变靶材几何尺寸和靶基距,研究此时膜厚均匀性误差的分布情况,发现:膜厚均匀性误差随着靶材几何尺寸的变大而整体减小;随着靶基距的增大,均匀性误差的中部先增大后减小,而两边一直减小.其次,在主辊动态条件下,固定靶材几何尺寸,仅改变靶基距,研究此时膜厚均匀性误差的分布规律,发现:随着靶基距的增大,膜厚均匀性误差先增大后减小.仿真实验结果还表明,动态膜厚均匀性误差位于静态膜厚均匀性误差分布曲线Max-Min的中部极值点与该分布曲线上参考点均值之间.通过对文中模型的仿真,可以较快地预测基于卷对卷矩形靶的动态膜厚均匀性误差范围,大大减少膜厚均匀性的实验调试次数.
A sputtering theoretical model based on roll-to-roll rectangular target is proposed. By using Matlab simulation software, the uniformity of the thickness of the flexible substrate (width of 100 mm, bending radius of 100 mm and bending angle of 80 °) Firstly, under the static condition of the main roll, the geometrical size and target distance of the target were changed, and the distribution of the error of the film thickness was studied. The results showed that the error of the film thickness became larger as the geometric size of the target became larger But decreases with the increase of the target distance.The center of the uniformity error first increases and then decreases and decreases on both sides.Secondly, under the dynamic condition of the main roller, the target geometry is fixed and only the target The results show that with the increase of the target distance, the uniformity of the film thickness increases first and then decreases.The simulation results also show that the dynamic film thickness uniformity error Is located between the central extreme point of the Max-Min error distribution curve of the static film thickness uniformity and the mean value of the reference point on the distribution curve.The simulation of the model in this paper can predict the dynamic film thickness Uniformity of the error range, greatly reducing the thickness of the experimental tune Number.