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采用热丝化学气相沉积生长出优异的金刚石薄膜。研究了薄膜的分层生长过程，薄膜的层状结构及膜厚随沉积时间的变化特性。
Hot wire chemical vapor deposition to grow an excellent diamond film. The layered growth process, the lamellar structure and the change of film thickness with deposition time were studied.