硅基铁电存储器是通过硅加工工艺在半导体集成电路中集成铁电体材料制成的新型存储器。这种新兴的存储器是铁电硅微集成系统 Ｆ Ｓ Ｍ Ｉ Ｓ 的一个重要应用，有望在低操作电压、低功耗、高存储密度、优异的非挥发存储性能等多方面超出单纯的半导体存储器，并很可能成为２１ 世纪重要的信息存储技术 Silicon-based ferroelectric memory is a new type of memory made by integrating ferroelectric materials into semiconductor integrated circuits through silicon processing. This emerging memory is an important application of ferroelectric silicon micro-integration system F S M I S, is expected to exceed the simple semiconductor in many aspects of low operating voltage, low power consumption, high storage density, excellent non-volatile storage performance Memory, and is likely to become an important information storage technology in the 21st century