检漏技术除了应用于真空技术之外.它正在向国民经济各个领域推广应用,大至几百立方米小至0.1立方毫米的各种腔体.当要求密封比较严格时,都需要应用检漏技术,随着科学技术的发展,各种腔体气密性要求越来越高.小腔体电子元件如半导体器件的检漏技术近几年来发展很快.国外在七十年代就有专门检漏小腔体的仪器,国内近两年也有了此类产 Leak detection technology in addition to vacuum technology used in. It is to promote the promotion of various fields of national economy, ranging from a few hundred cubic meters as small as 0.1 cubic millimeters of various cavities. When more stringent requirements of the seal, the need to apply leak detection Technology, with the development of science and technology, a variety of cavity gas tightness requirements are higher and higher.Large cavity electronic components such as semiconductor devices leak detection technology has developed rapidly in recent years.Foreign in the seventies there is a special inspection Leakage of small cavity instruments, the country has produced such products in the past two years