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介绍了一种空间三自由度纳米定位平台,其应用背景为光刻投影物镜波像差检测系统的精密对准,因此对定位精度和定位速度都提出了很高的要求。首先简要介绍了空间三维纳米定位台;然后将模糊控制同传统PI(比例积分)控制相结合,利用定位偏差和偏差变化率信息,通过模糊推理实时调整PI控制参数,并在VC++环境下实现了模糊自整定PI参数的控制算法。实验结果表明,该控制方法较常规PI控制器能够有效地提高响应速度,减小阶跃响应超调量,保证了控制的实时性。
A three-DOF nano-positioning platform is introduced. Its application background is the precise alignment of the imaging system of the lithography projection objective. Therefore, both the positioning accuracy and the positioning speed are put forward high requirements. Firstly, the three-dimensional spatial nano-positioning stage is briefly introduced. Then the fuzzy control is combined with the traditional PI (Proportional Integral) control. The PI control parameters are adjusted in real time by fuzzy inference using the information of the positioning deviation and the rate of change of deviation. Fuzzy Self - tuning PI Parameters Control Algorithm. The experimental results show that the proposed control method can effectively improve the response speed and reduce the overshoot of step response compared with the conventional PI controller, ensuring the real-time control.