束流是离子注入机的一个重要技术指标,是生产注入机厂家和用户都特别关心的问题。人们通常用这个指标对同类型机器进行性能对比,来评价机器的优异程度。我们了解到不少机器的法拉第筒测得的束流,并不就是晶片上接收的束流。晶片上接收的束流,本文称为离子注入机的有用束流,通常它是小于或等于法拉第筒测得的束流。对于用户来说,最有实际意义的是有用束流。所以,我们在评价机器的生产能力时,应该注重的是考查机器的有用束流的大小。 Beam injection is an important technical indicator for ion implanters and is a particular concern for manufacturers and users of implanters. People usually use this indicator to compare the performance of the same type of machine to evaluate the excellent degree of the machine. We know that many of the machine’s Faraday cup measured beam, not the beam received on the wafer. The beam received on the wafer, referred to herein as a useful beam of an ion implanter, is typically less than or equal to the beam current measured by the Faraday cup. For the user, the most practical is the useful beam. Therefore, when evaluating the productivity of a machine, we should focus on examining the useful beam size of the machine.