论文部分内容阅读
以测量精度为1μm的商用坐标测量机(CMM)为基础,构建了测量范围为25mm×40mm×25mm、测量不确定度约为0.15μm的PTB微纳米专用坐标测量机.研究了CMM的运动控制系统、恒温室的空调系统以及CMM的被动隔振系统等对测量结果的影响.由测量结果可以看出,CMM的运动控制系统产生的噪声水平约为其他误差源的2倍.通过FFT运算,发现未优化系统的短时最大漂移量发生频率为750Hz,对应为运动控制的工作频率.文中还介绍了测量力为1μN光纤探针的测量原理,并给出了对2.5mm短轴的测量结果.
Based on CMM (CMM) with measurement accuracy of 1μm, a PTM micro / nano special coordinate measuring machine with a measuring range of 25mm × 40mm × 25mm and a measurement uncertainty of 0.15μm was constructed. The CMM motion control System, thermostatic chamber air conditioning system and CMM passive vibration isolation system, etc. The measurement results show that the CMM motion control system generates about 2 times the noise level of other error sources.Through the FFT operation, It is found that the short-time maximum drift of unoptimized system is 750Hz, corresponding to the working frequency of motion control.The measuring principle of 1μN fiber probe with measuring force is also introduced and the measurement results of 2.5mm short axis are given .