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研究了一种采用单线阵CCD测量二维工作台位移的方法。提供给CCD一个发光面形状为直角三角形的被拍摄目标,该目标固结在二维工作台上。使被拍摄目标的像在CCD光敏线上的宽度和位置随二维工作台的位置而改变,通过用一个单线阵CCD测量出目标像的宽度和位置,就可以同时测量出二维工作台在正交的X和Y方向的位移。相对传统的二维位移测量系统来说,所提出的系统具有结构简单,测量速度快和成本低的优点。
A method of measuring displacement of two-dimensional workbench with single linear CCD is studied. Provided to the CCD a light-emitting surface shape is a right triangle was shot target, the target consolidation in the two-dimensional workbench. The width and position of the image of the target to be photographed on the CCD photosensitive line is changed according to the position of the two-dimensional table. By measuring the width and the position of the target image with a single linear CCD, the two-dimensional table can be measured at the same time Orthogonal X and Y direction of displacement. Compared with the traditional two-dimensional displacement measuring system, the proposed system has the advantages of simple structure, fast measuring speed and low cost.