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非球面高精度检测是目前光学检测研究的热点和难点之一。计算全息(CGH)技术是非球面检测的重要方法,但检测精度受到许多因素的影响。对CGH检测抛物面的误差进行了深入研究。应用Zemax软件对各种检测误差进行模拟计算,利用CGH对抛物面面形进行实际测量,对测量结果中较大的透射波前误差、彗差、球差等进行分析,并将CGH法与共焦小球法的检测进行了结果对比。结果表明,CGH法的设计和制造精度很高,标定基底的透射波前后,理论检测误差均方根(RMS)值低于4.2nm。实际检测中,CGH的离焦和抛物面偏心会造成较大的测量误差,精密调整后的测量误差RMS值优于4.5nm。
Aspheric high-precision detection is one of the hot and difficult problems in optical detection. Computational holography (CGH) is an important method of aspheric detection, but the accuracy of detection is affected by many factors. The error of CGH testing paraboloid has been deeply studied. In this paper, we use Zemax software to simulate various detection errors, use CGH to measure the paraboloid shape, and analyze the large transmission wavefront error, coma and spherical aberration in the measurement results. The test results were compared. The results show that the design and fabrication precision of CGH method is very high. RMS of theoretical detection error is lower than 4.2 nm before and after the transmitted wave of calibration substrate. Actual detection, CGH defocus and parabolic eccentricity will cause a large measurement error, precision adjusted measurement error RMS value is better than 4.5nm.