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用超声喷雾热解法制备SnS多晶薄膜,对比了三种不同前驱液配比浓度对SnS薄膜性能的影响。XRD测试表明,当前驱液为硫脲(0.5 mol·L-1)+四氯化锡(0.5 mol·L-1)+去离子水时,SnO2的衍射峰强度比较大;当前驱液为硫脲(0.6 mol·L-1)+四氯化锡(0.5 mol·L-1)+去离子水时,SnS的衍射峰占主要地位,其中也含有一定量的SnO2;当前驱液为硫脲(0.7 mol·L-1)+四氯化锡(0.5 mol·L-1)+去离子水时,退火后的薄膜为单一的SnS薄膜,具有斜方晶系结构。SEM观测发现,薄膜均匀、致密,前驱液中硫脲浓度较大时,颗粒也较大。透过谱测试表明,浓度对薄膜透过率影响较小。结合器件的暗I-V和C-V测试,用三种前驱液配比浓度所制备的器件的结特性差异不大;当前驱液中硫脲浓度较大时,载流子浓度相对较大。
The SnS polycrystalline films were prepared by ultrasonic spray pyrolysis, and the effect of the three different precursor concentration on the properties of SnS films was compared. The results of XRD showed that when the current flooding liquid was 0.5 mol·L-1 thiocyanate (0.5 mol·L-1) + deionized water, the diffraction peak intensity of SnO2 was relatively large. When the current flooding fluid was sulfur When the concentration of urea (0.6 mol·L-1) + tin tetrachloride (0.5 mol·L-1) + deionized water, the diffraction peak of SnS dominates, which also contains a certain amount of SnO2. The current flooding solution is thiourea (0.7 mol·L-1) + tin tetrachloride (0.5 mol·L-1) + deionized water, the annealed film is a single SnS film with an orthorhombic structure. SEM observation shows that the film is uniform and dense, and the particle size is also larger when the concentration of thiourea in the precursor solution is larger. Through the spectrum test showed that the concentration of the film had little effect on the transmittance. Combined with the dark I-V and C-V tests of the devices, the junction characteristics of the devices prepared with the three precursors were not significantly different, and the concentration of thiourea in the current flooding solution was relatively large.