本文简要介绍当前国内外超精密机床的发展概况及构成超精密加工机床的关键技术部件,详细地综述了应用于超精密加工的控制策略。超精密机床的发展概述精密与超精密切削加工技术是先进制造技术的重要领域。当代的精密工程、微细工程和纳米技术是现代制造技术的前沿、未来技术的基础。中国企业也必将进入该领域的竞争。通常将加工精度在0.1-1μm,加工表面粗糙度Ra在0.02-0.1μm之间的加工方法称为精密加工,而将加工精度高于0.1μm,加工表面粗糙度Ra小于0.01μm(10纳米)的加工方法称为超精密加工。表1为按加工精度划分加工精度密度级别。 This article briefly introduces the current development of ultra-precision machine tools at home and abroad and constitute the key components of ultra-precision machining machine tools, a detailed overview of the application of ultra-precision machining control strategy. Development of ultra-precision machine tools Overview Precision and ultra-precision machining technology is an important area of ​​advanced manufacturing technology. Contemporary precision engineering, micro engineering and nanotechnology are the forefront of modern manufacturing technology, the basis of future technology. Chinese enterprises will also enter the competition in this field. Usually the processing accuracy of 0.1-1μm, the processing surface roughness Ra between 0.02-0.1μm processing method known as the precision machining, and the processing accuracy is higher than 0.1μm, the processing surface roughness Ra less than 0.01μm (10nm) The processing method is called ultra-precision machining. Table 1 according to the processing accuracy of processing precision density level.