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回顾了低能离子注入单晶 Si经由核弹性碰撞引起的损伤特征及其常规的研究方法 ,介绍了快重离子辐照单晶 Si经由电子能损引起的损伤特点及研究现状 ,并对该领域的研究作了展望
In this paper, the damage characteristics of single-crystal Si implanted by low-energy ion-implanted Si via nuclear elastic collision and its conventional research methods are reviewed. The damage characteristics and research status of single-crystal Si irradiated by fast-heavy ions by electron energy damage are introduced. The research made a prospect