一、前　 言 “电子探针X射线显微分析”是从英文“ElectronProbe X-ray Microanalysis”直译过来的,简称“电子探针”.如果用“微区X射线光谱分析”这一名称,则更为符合实际.因为它是利用高速运动的电子束经电磁透镜聚焦形成极细的探针,从试样上很小区域激发出X射线,再经X射线 I. INTRODUCTION “Electron probe X-ray microanalysis” is translated literally from the English “ElectronProbe X-ray Microanalysis,” or “Electron Probe.” If you use the term "micro-area X-ray spectroscopy, In line with the actual because it is the use of high-speed electron beam focused by the electromagnetic lens to form a very fine probe from a small area on the sample excited X-ray, and then by X-ray