采用溶胶凝胶方法在K9玻璃基片上镀制了SiO2增透膜,并对其中一些样品进行了氨处理。分别采用原子力显微镜、红外光谱仪、椭偏仪、透射式光热透镜测试了氨处理前后薄膜的微观表面形貌、化学结构、折射率和弱吸收。实验结果表明:经氨处理后薄膜的孔隙率从0.73降低到0.63,其弱吸收从67.88×10-6增加到74.58×10-6,薄膜的激光损伤阈值从处理前的18.0J/cm2降低到16.9J/cm2。考虑到氨处理能提高SiO2增透膜的机械性能,实际应用中应根据需要折中处理。 The SiO2 antireflection coating was coated on the K9 glass substrate by sol-gel method, and some of the samples were treated with ammonia. The surface morphology, chemical structure, refractive index and weak absorption of the films before and after ammonia treatment were tested by atomic force microscopy, infrared spectroscopy, ellipsometry and transmission photothermal lens respectively. The experimental results show that the porosity of the film decreases from 0.73 to 0.63 and the weak absorption increases from 67.88 × 10-6 to 74.58 × 10-6. The laser damage threshold decreases from 18.0J / cm2 before the treatment to 16.9J / cm2. Taking into account the ammonia treatment can improve the mechanical properties of SiO2 AR coating, the actual application should be compromised according to the needs of treatment.