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本文介绍红外电荷扫描器件(CSD——Charge Sweep Device)的探测机理、传感器的构造、器件特性和应用实例。所举出的实例其红外图象传感器是红外图象传感器中分辨率最高的一种。通常,为了实现高分辨率需要缩小象元尺寸而导致性能下降,本器件采用CSD方式可获得很高的孔径率。并且,本器件以成品率较高的硅VLSI工艺为基础,面向今后的实用化,这是一种很有发展前途的器件。
This paper introduces the detection mechanism of infrared charge scanning device (CSD - Charge Sweep Device), the structure of the sensor, the characteristics of the device and the application examples. The cited examples of its infrared image sensor infrared image sensor in the highest resolution. In general, CSD is used to achieve very high aperture ratios in this device due to the reduced performance required to achieve pixel size reduction for high resolution. In addition, the device is based on the silicon VLSI process with high yield. For future practical application, this device is a promising device.