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采用直流磁控反应混合靶共溅射的方法,在玻璃基体上制备出了Fe掺杂的TiO2膜,优化了沉积条件以制备出均匀透明的TiO2膜。通过调整固定在Ti靶上的Fe片面积可以控制膜中Fe的浓度。随着Fe浓度的增加,膜的表面形貌从平整变得粗糙。Fe含量低的膜为锐钛矿晶体结构,在Fe含量高的膜中出现了Fe的氧化物。在纯TiO2膜中钛以Ti4+的形式存在,而在含Fe的膜中钛的氧化态下降,出现了混合价态。Fe的存在导致膜的光谱吸收边沿向可见光谱方向移动。Fe掺杂浓度低的膜比纯TiO2膜表现出了更强的光催化活性。另一方面,过多Fe的掺杂导致TiO2膜的光催化活性快速下降。
Fe-doped TiO2 films were prepared on a glass substrate by co-sputtering with DC magnetron reaction. The deposition conditions were optimized to prepare a uniform and transparent TiO2 film. The concentration of Fe in the film can be controlled by adjusting the area of the Fe sheet immobilized on the Ti target. With the increase of Fe concentration, the surface morphology of the films changed from flat to rough. The film with low Fe content is anatase crystal structure, and the oxide of Fe appears in the film with high Fe content. Titanium exists in the form of Ti4 + in the pure TiO2 film, while the oxidation state of titanium in the Fe-containing film decreases, resulting in a mixed valence state. The presence of Fe causes the spectral absorption edge of the film to move toward the visible spectrum. The film with low Fe doping concentration showed stronger photocatalytic activity than pure TiO2 film. On the other hand, the excessive doping of Fe results in a rapid decrease of the photocatalytic activity of the TiO2 film.