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Mirau相移干涉中的参考面对光路造成了中心遮拦。理论分析了被测面视场、Strehl判据、分辨本领、调制传递函数MTF以及残余像差和中心遮拦的关系,得到参考面的允许直径0.8～1.28mm。设计了参考面直径D=1.0mm的Mirau干涉物镜,其中心遮拦ε=0.129,和没有中心遮拦的系统相比,MTF变化的幅度不超过6%,允许的残余像差为0.978。
The reference in Mirau phase-shift interference creates a central obstruction to the light path. The relationship between the measured field of view, Strehl criterion, resolving power, modulation transfer function (MTF) and residual aberration and center obstruction is theoretically analyzed. The allowable diameter of reference surface is 0.8 ~ 1.28mm. A Mirau interference objective with a reference surface diameter of D = 1.0mm was designed with a center obscuration of ε = 0.129. The magnitude of the MTF change was less than 6% and the allowable residual aberration was 0.978 compared to a system without central obscuration.