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纳米晶固体材料是由粒径小于100nm的微晶颗粒聚集而成的块状或薄膜人工固体,它具有特殊性能。本文采用sol-gel法制备了LaFeO_3纳米晶薄膜,并与集成电路平面工艺相结合,首次研制出了用纳米晶薄膜作为栅控制极的MOS场效应晶体管乙醇敏感元件。
Nanocrystalline solid material is a block or thin film artificial solid which is composed of microcrystalline particles with particle size less than 100nm, which has special properties. In this paper, the LaFeO_3 nanocrystalline thin films were prepared by sol-gel method and combined with the integrated circuit planarization process, the MOS sensor with the nanocrystalline thin film as gate control electrode was developed for the first time.