论文部分内容阅读
A scanning near field acoustic microscopy(SNAM) used in imaging the topography of precise surfaces is presented. As a micro force sensor, a non encapsulated 1 MHz quartz resonator is damped by hydrodynamic forces when approaching an object. Thus the oscillating characteristics of the leg of the quartz resonator change. While measuring the decrease of the amplitude of vibrating, the shape of the object can be obtained. Based on the analyses of the principle and key parameters of SNAM, a SNAM is exploited. A lateral resolution of 0.5 μm and vertical resolution of 2 nm has been achieved in the experiments.
A scanning near field acoustic microscopy (SNAM) used in imaging the topography of precise surfaces is presented. As a micro force sensor, a non encapsulated 1 MHz quartz resonator is damped by hydrodynamic forces when approaching an object. Thus the oscillating characteristics of the leg of the quartz resonator change. While measuring the decrease of the amplitude of vibrating, the shape of the object can be obtained. Based on the analyzes of the principle and key parameters of SNAM, a SNAM is exploited. A lateral resolution of 0.5 μm and vertical resolution of 2 nm has been achieved in the experiments.