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近年来,PN结测温技术发展很快,硅PN结测温传感器在国际市场上已商品化。但硅PN结测温上限只能达到200℃。为了提高测量上限,机械工业自动化所研制成功一种碳化硅(SiC)PN结温度传感器,并由东风电热元件厂投入生产。碳化硅是一种耐高温的半导体材料,化学性质非常稳定,在空气中800℃以下不氧化、2000℃以下不发生明显的分解。用这种材料制作的温度传感器,测温范围可达到0～500℃。与热电偶、金属电阻及热电阻比
In recent years, PN junction temperature measurement technology has developed rapidly, silicon PN junction temperature sensor has been commercialized in the international market. But the silicon PN junction temperature limit can only reach 200 ℃. In order to improve the upper limit of measurement, the mechanical industrial automation has successfully developed a silicon carbide (SiC) PN junction temperature sensor, which is put into production by Dongfeng Electric Heating Components Factory. Silicon carbide is a high temperature semiconductor materials, chemical properties are very stable, in the air below 800 ℃ does not oxidize, below 2000 ℃ did not occur obvious decomposition. Temperature sensor made with this material, the temperature range can reach 0 ~ 500 ℃. With thermocouple, metal resistance and thermal resistance ratio