针对薄板玻璃的刚度差,在研磨中容易产生变形这一特点,提出了一种新的加工方法。以加工薄施密特校正板(厚径比小于1/40)为例,用传统的上盘粘接固定工件进行加工,工件在下盘前的面形精度较好,但下盘后产生的变形使其面形精度下降,不能满足要求。采用真空模具法,吸附工件从而使工件固定产生预期的变形,面形精度易于控制,使加工非球面转变为加工平面,降低了加工难度,消除了工件在粘接过程中温度所引起的变形,降低了加工时的不均匀压应力,从而减少了变形,使得加工后的面形与加工过程中的面形接近,最终保证了工件的面形精度。 Aiming at the poor rigidity of thin glass, it is easy to deform during grinding. A new processing method is proposed. To thin Schmidt correction plate (thickness ratio of less than 1/40), for example, the use of traditional bonding plate fixed workpiece processing, the workpiece in the lower surface of the disk before the shape accuracy is better, but the deformation after the plate Make it reduce the accuracy of surface shape, can not meet the requirements. The vacuum mold method is adopted to adsorb the workpiece so that the workpiece can be fixed for the expected deformation and the surface shape accuracy is easily controlled so that the aspherical surface can be transformed into the processing plane to reduce the processing difficulty and eliminate the deformation caused by the temperature of the workpiece during the bonding process. Which reduces the non-uniform compressive stress during processing, reduces the deformation and makes the surface shape after processing is close to the surface shape during processing, finally ensuring the surface shape accuracy of the workpiece.