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报道了一种基于多模干涉(MMI)耦合器的马赫曾德尔干涉仪(MZI)型2×2集成热光开关的实验研究结果,插损为3.40 dB,偏振相关损耗为0.47 dB,直通和交叉状态消光比分别为32.01 dB和16.42 dB,响应时间小于3 ms,开关功耗为658 mW。针对直通和交叉状态消光比不对称的现象,从理论上做出了解释,因为半导体平面光波电路(PLC)工艺一致性较好,两个多模干涉耦合器的分光比虽然因工艺误差偏离50∶50,但误差量相近,这个特点对光开关直通和交叉状态的消光比产生了不同影响。分析了在波导上制作加热电极对波导有效折射率的影响,估算其增量在2×10-4量级。
An experimental study on a Mach-Zehnder interferometer (MZI) type 2 × 2 integrated thermo-optical switch based on a multimode interference (MMI) coupler is reported. The insertion loss is 3.40 dB and the polarization-dependent loss is 0.47 dB. Cross-state extinction ratios were 32.01 dB and 16.42 dB, respectively, with response times of less than 3 ms and switching power consumption of 658 mW. Aiming at the phenomena of asymmetric extinction ratio between straight-through and crossed states, a theoretical explanation is given. Because the consistency of semiconductor planar lightwave circuit (PLC) technology is good, the splitting ratio of two multimode interference couplers deviates from 50 : 50, but the error is similar, this feature has different effects on the extinction ratio of the optical switch through and the cross state. The influence of heating electrodes on the effective refractive index of the waveguide is analyzed. The increment is estimated to be in the order of 2 × 10-4.