论文部分内容阅读
提出了一种简易的基于SU8和PMMA的电泳芯片的制作方法,研究了PMMA基底上SU8胶微管道的光刻和薄膜微电极的lift-off制作工艺,探讨了PMMA材料特性对薄膜微电极和SU8胶光刻的影响,通过热压方法完成芯片的键合封装,实现了一种快速、高质量的电泳芯片制作工艺,同时与电泳芯片的UV-LIGA工艺具有很好的兼容性。
A simple method for fabricating electrophoresis chip based on SU8 and PMMA was proposed. The fabrication process of SU8 micro-pipe lithography and lift-off process of thin film microelectrode on PMMA substrate was studied. The effects of PMMA material properties on the performance of thin film microelectrode and SU8 glue lithography, through the hot pressing method to complete the chip bonding package, to achieve a fast, high quality electrophoresis chip production process, and electrophoresis chip UV-LIGA process has good compatibility.