论文部分内容阅读
本文研究了3英寸372×276象素a—Si TFT有源矩阵的优化设计理论,讨论了材料物理参数和器件结构参数对器件性能的影响,并对其制作工艺进行了系统研究。
In this paper, the optimal design theory of 3-inch 372 × 276 pixel a-Si TFT active matrix is studied. The influence of material physical parameters and device structure parameters on the device performance is discussed. The fabrication process is studied systematically.