Performance Dengradation of Si Device With the Change of Lifetime Under Laser Irradation

来源 :LIMIS 2016——The 4th International Symposium on Laser Interac | 被引量 : 0次 | 上传用户:a1402070128
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  When laser interacts with semiconductor,such as laser processing,laser-induced surface melting and liquid-state diffusion of dopant atoms occurs.
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