【摘 要】
：
In recent years,with the development of modern optics and laser technology,modern industry for optical surface roughness measurement precision of the increasingly high demand,real-time,fast and precis
【机 构】
：
Changchun University of Science and Technology China
【出 处】
：
2016年第二届光子学与光学工程国际会议暨第八届西部光子学会议
论文部分内容阅读
In recent years,with the development of modern optics and laser technology,modern industry for optical surface roughness measurement precision of the increasingly high demand,real-time,fast and precise measurement of surface roughness has become constant subject of optical components in processing and test.In this paper,the current method of measuring the surface roughness of optical components were described in detail,including light scattering method,interferometric method,speckle method,and optical stylus method.Besides,the principles and characteristics of different methods were introduced respectively.
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