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In this paper, ITO (Indium Tin Oxide) nanopowders are prepared by a modified chemical co-precipitation process.Influences of different Sn concentration on decomposition behavior of ITO precursors, on the phase and morphology of ITO precursors and ITO nanopowders were investigated respectively by X-ray Diffraction, Transmission Electron Microscope and Differential Thermal and Thermogravimetry analysis methods.