The Tribological Properties of Diamond Films According to the Methane Gas Ratio Synthesized by a Mic

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：killpl12

【摘要】

：

Various techniques such as seeding with diamond particulates,surface scratching,and laser pre-processing,have been applied to enhance the nucleation rate for growing diamond films.

【作者】

：

A. Jeon Y. Kim S. Lee Y. Jung W. S. Choi

【机构】

：

Department of Electrical Engineering, Hanbat National University, Daejeon, 305-719, Republic of Kore

【出处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

【关键词】

：

Diamond film Microwave plasma enhanced chemical vapor deposition (PECVD) Methane

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Various techniques such as seeding with diamond particulates,surface scratching,and laser pre-processing,have been applied to enhance the nucleation rate for growing diamond films.

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The Tribological Properties of Diamond Films According to the Methane Gas Ratio Synthesized by a Mic

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