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5. Preparation of the AZO/Ag/AZO transparent conductive films on polyimide and glass substrates using p

Preparation of the AZO/Ag/AZO transparent conductive films on polyimide and glass substrates using p

来源 :2015 Shanghai Thin Film Conference(2015上海薄膜国际会议) | 被引量 : 0次 | 上传用户：gwj19861113

【摘 要】

：

The sandwich films composed aluminum ions doped zinc oxide(AZO)/silver(Ag)/aluminum doped zinc oxide(AZO)films were prepared on polyimide(PI)and glass substrates by RF magnetron sputtering using the p

【作 者】

：

WU Chuan ZHOU Yan-wen LIU Si-ning SHA Tian-yi 

【机 构】

：

School of Materials and Metallurgy,University of Science & Technology Liaoning,Anshan

【出 处】

：

2015 Shanghai Thin Film Conference(2015上海薄膜国际会议)

【发表日期】

：

2015年6期

【关键词】

：

powder target organic substrate TCO multilayer film 

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　　The sandwich films composed aluminum ions doped zinc oxide(AZO)/silver(Ag)/aluminum doped zinc oxide(AZO)films were prepared on polyimide(PI)and glass substrates by RF magnetron sputtering using the powder AZO target and the solid Ag target at room temperature.

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