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A large amount of silicon sludge is produced as waste during the slicing of siliconingots into thin wafers used for IC chips and solar cells.
Recycling of Silicon Sludge to Silicon Tetrachloride and Porous Carbon via Chlorination
【摘 要】
：
A large amount of silicon sludge is produced as waste during the slicing of siliconingots into thin wafers used for IC chips and solar cells.
【机 构】
：
DepartmentofChemicalEngineering,KongjuNationalUniversity,275Budae-dong,Seobuk-gu,Cheonan,Chungnam331
【出 处】
：
The 12th International Symposium on East Asian Recycling Tec
【发表日期】
：
2013年11期
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